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The effect of variation of the WF6 flow rate on the contact resistance in the DCS-based WSix deposition

✍ Scribed by Yang Hee Joung; Kyoung Won Kim; Seong Jun Kang

Book ID
104420680
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
359 KB
Volume
6
Category
Article
ISSN
1369-8001

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## Abstract The sensitivity of the burning rate to variations in physical and chemical properties of synthetic polymers has been examined in order to understand the relative importance of the knowledge of these properties. The sensitivity analysis was performed using a numerical pyrolysis model cal