✦ LIBER ✦
The effect of the driving frequency on the optimum hole diameter for efficient multi-hole electrode RF capacitively coupled plasma
✍ Scribed by Lee, HunSu; Kim, EunAe; Lee, YunSeong; Chang, HongYoung
- Book ID
- 122644034
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 319 KB
- Volume
- 547
- Category
- Article
- ISSN
- 0040-6090
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