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The effect of Rowland ghost on sub-micromachining using Femtosecond pulsed laser

✍ Scribed by Ngoi, B.K. Ann; Venkatakrishnan, Krishnan; Tan, B.; Sivakumar, Narayanswamy


Book ID
115403371
Publisher
Optical Society of America
Year
2001
Tongue
English
Weight
189 KB
Volume
8
Category
Article
ISSN
1094-4087

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## Abstract Pulsed laser illumination constitutes an excellent tool to emulate the effects produced by the impact of highly energetic particles on electronic circuits. Numerical simulation techniques could be used to study these effects and to establish accurate relationships between the laser para