✦ LIBER ✦
The effect of process parameters on dc self-bias voltage in reactive ion etching of GaAs using CH4/H2
✍ Scribed by H.F. Sahafi; A.P. Webb; M.A. Carter; G.F. Goldspink
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 317 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0026-2692
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