Effect of annealing treatment and nanome
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Bo-Ching He; Hua-Chiang Wen; Meng-Hung Lin; Yi-Shao Lai; Wen-Fa Wu; Chang-Pin Ch
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Article
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2010
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Elsevier Science
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English
โ 744 KB
Multilayered silicon-germanium (SiGe) films consisting of alternating sublayers with different mechanical properties have been epitaxially deposited by an ultra-high vacuum chemical vapor deposition (UHV/ CVD) system. We report engineering of the mechanical properties of SiGe multilayer films by a c