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The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing

✍ Scribed by A. Loui; F.T. Goericke; T.V. Ratto; J. Lee; B.R. Hart; W.P. King


Book ID
108262962
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
929 KB
Volume
147
Category
Article
ISSN
0924-4247

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