Effects of oxygen pressures on pulsed la
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Z.G. Zhang; F. Zhou; X.Q. Wei; M. Liu; G. Sun; C.S. Chen; C.S. Xue; H.Z. Zhuang;
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Article
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2007
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Elsevier Science
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English
โ 421 KB
Zinc oxide (ZnO) thin films on Si (1 1 1) substrates were deposited by pulsed laser ablation of ZnO target at different oxygen pressures. A pulsed Nd:YAG laser with wavelength of 1064 nm was used as laser source. The deposited thin films have been characterized by X-ray diffraction (XRD), Atomic for