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The effect of molecular ions on the plasma parameters in a medium pressure rare gas radio frequency discharge positive column

โœ Scribed by Chang, Jen-Shih; Ichikawa, Y.; Hobson, R. M.; Matsumura, S.; Teii, S.

Book ID
124103386
Publisher
American Institute of Physics
Year
1992
Tongue
English
Weight
720 KB
Volume
72
Category
Article
ISSN
0021-8979

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