✦ LIBER ✦
The effect of ion species on bombardment induced topography during ion etching of silicon : G. Carter, G. W. Lewis, M. J. Nobes, J. Cox and W. Begemann. Vacuum34 (3–4), 445 (1984)
- Book ID
- 107829758
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 133 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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