✦ LIBER ✦
The effect of hydrogen as an additive in reactive ion etching of GaAs for obtaining polished surface
✍ Scribed by F.N. Dultsev; L.A. Nenasheva
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 324 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0169-4332
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