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The effect of hydrogen and temperature on the optical gaps of silicon nitride and comparative stoichiometry studies on SiN thin films

✍ Scribed by J. Petalas; S. Logothetidis; S. Boultadakis; A. Markwitz


Book ID
115990375
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
375 KB
Volume
187
Category
Article
ISSN
0022-3093

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