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The effect of growth temperature and spraying rate on the properties of ZnO:In films

✍ Scribed by Merike Vent; Erki Kärber; Tarmo Unt; Arvo Mere; Malle Krunks

Book ID
112182496
Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
258 KB
Volume
9
Category
Article
ISSN
1862-6351

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## Abstract Heavily‐doped ZnO:Al films have been deposited on high temperature stable glass substrates using radio‐frequency (RF) magnetron sputtering. The effect of growth temperature on physical properties of the films has been investigated. The microstructure evolved a columnar structure into a