✦ LIBER ✦
The effect of germane variation on microstructure in polycrystalline Si/Si 1-x Ge x thin films grown by rapid thermal chemical vapour deposition: fractal characterisation using scanning probe microscopy
✍ Scribed by Campbell, P.A.; McNeill, D.W.; Walmsley, D.G.; Chong, R.L.F.; Gay, D.; Gamble, H.S.
- Book ID
- 113035407
- Publisher
- Springer
- Year
- 1998
- Tongue
- English
- Weight
- 671 KB
- Volume
- 66
- Category
- Article
- ISSN
- 1432-0630
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