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The effect of gas temperature on the growth of InP by atomspheric pressure metal-organic chemical vapor deposition using trimethyl indium and PH3sources

✍ Scribed by J. L. Zilko; D. L. Van Haren; P. Y. Lu; N. E. Schumaker; S. Y. Leung

Book ID: 112814199
Publisher: Springer US
Year: 1985
Tongue: English
Weight: 356 KB
Volume: 14
Category: Article
ISSN: 0361-5235
DOI: 10.1007/bf02654025

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