Effect of collision cascade density on r
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A.Yu. Azarov; A.I. Titov; P.A. Karaseov; A. HallΓ©n
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Article
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2009
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Elsevier Science
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English
β 409 KB
The damage accumulation in 6H-SiC bombarded at room temperature with 1.3 keV/amu atomic P + ions and small cluster ions PF ΓΎ n (n = 2 and 4) have been studied by Rutherford backscattering spectrometry in channeling mode. Results show that collision cascade density strongly affects damage buildup in