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The effect of focusing on collision cascade anisotropies

✍ Scribed by M. Hautala; J. Likonen


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
568 KB
Volume
131
Category
Article
ISSN
0375-9601

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Effect of collision cascade density on r
✍ A.Yu. Azarov; A.I. Titov; P.A. Karaseov; A. HallΓ©n πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 409 KB

The damage accumulation in 6H-SiC bombarded at room temperature with 1.3 keV/amu atomic P + ions and small cluster ions PF ΓΎ n (n = 2 and 4) have been studied by Rutherford backscattering spectrometry in channeling mode. Results show that collision cascade density strongly affects damage buildup in