The Effect of Film Thickness on the Suitability of Titanium Oxynitride (TiNxOy, x + y = 1) Films as Heat Mirrors – Formed by the Atmospheric Pressure CVD of TiCl4 and NH3
✍ Scribed by G. Hyett; R. Binions; I. P. Parkin
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 312 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0948-1907
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✦ Synopsis
Abstract
Films of titanium oxynitride are assessed for their potential as heat mirror coatings on window glass, as a function of the film thickness. The coatings are deposited from the atmospheric pressure (AP) chemical vapor reaction of TiCl~4~ and ammonia. The heat mirror properties are evaluated using transmission and reflection spectroscopy. The composition of the samples is determined by X‐ray photoelectron spectroscopy (XPS), and the thickness of the films by scanning electron microscopy (SEM). These results suggest that an effective heat mirror can be formed by a 100 nm thick coating of titanium oxynitride, which has a transmission of 49 % in the visible (610 nm), and a reflection of 46 % in the near infrared (1320 nm).