The effect of EB irradiation with and without hot-jet Cl2 on an ultra-thin GaN layer for selective etching

✍ Scribed by Seikoh Yoshida; Masahiro Sasaki; Tomonori Ishikawa

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 365 KB
• Volume: 100-101
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(96)00283-8