The effect of de-ionized water rinsing after immersion in hydrofluoric acid on the electrical conductivity of silicon nanomembranes

✍ Scribed by Xiang-Fu Zhao; Ping Han; Qiang Guo

• Book ID: 113937292
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 361 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.09.051