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The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon

✍ Scribed by D.P. Birnie III; M.H. Jilavi; T. Krajewski; R. Naß

Book ID
110265750
Publisher
Springer
Year
1998
Tongue
English
Weight
163 KB
Volume
13
Category
Article
ISSN
0928-0707

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## Abstract We investigated the effects of capping layer on the crystallization of amorphous top‐CoFeB electrode in the glass/CoFeB/MgO(001)/CoFeB/cap stack. Evolution of texture and crystallization of the top‐CoFeB electrode can be affected by the texture and the crystallinity of the capping layer