The effect of an additional Ti layer in a sub-μm double level TiTiNAlSiCuTiN metallization for a CMS-LOGIC-process

✍ Scribed by K.-H. Stegemann; C. Beyer; V. Heinig; V. Kahlert; J. Pahner

• Book ID: 114155699
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 599 KB
• Volume: 37-38
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(97)00140-8