✦ LIBER ✦
The dose, energy, and time dependence of silicon self-implantation induced transient enhanced diffusion at 750 °C
✍ Scribed by H. S. Chao; P. B. Griffin; J. D. Plummer; C. S. Rafferty
- Book ID
- 121843962
- Publisher
- American Institute of Physics
- Year
- 1996
- Tongue
- English
- Weight
- 332 KB
- Volume
- 69
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.116897
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