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The distribution of hydrogen in polycrystalline CVD diamond

โœ Scribed by Maclear, R.D.; Butler, J.E.; Connell, S.H.; Doyle, B.P.; Machi, I.Z.; Rebuli, D.B.; Sellschop, J.P.F.; Sideras-Haddad, E.


Book ID
123060108
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
676 KB
Volume
8
Category
Article
ISSN
0925-9635

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Understanding of the incorporation of hydrogen and its role in determining the properties of CVD diamond is critical to the successful commercial production of these films. Hydrogen is usually the most abundant impurity in solid-state CVD diamond and has been studied extensively by a variety of tech