The different characteristics of boron and nitrogen atoms/ions on silicon (001) substrate and their effect on boron nitride growth

✍ Scribed by Zhang, R.Q; Chu, T.S; Bello, I; Lee, S.T

• Book ID: 123326427
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 177 KB
• Volume: 9
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(00)00327-7