The development and application of an ion implanter based on ion thruster technology : Paul J. Wilbur and Larry O. Daniels. Vacuum36(1–3), 5 (1986)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 129 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90284-8