✦ LIBER ✦
The determination of the average compositions of amorphous interlayers in the VSi system using a buried ultrathin oxide layer and a capping Mo layer to define the reference planes for interdiffusion
✍ Scribed by J.H. Lin; L.J. Chen
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 314 KB
- Volume
- 92
- Category
- Article
- ISSN
- 0169-4332
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