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The desorption behaviour of implanted noble gases at low energy on silicon surfaces

✍ Scribed by A.H.M. Holtslag; A. Van Silfhout

Publisher: Elsevier Science
Year: 1987
Weight: 53 KB
Volume: 187
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(87)90866-8

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