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The design of an in-plane compliance structure for microfluidical systems

✍ Scribed by T.T. Veenstra; N.R. Sharma; F.K. Forster; J.G.E. Gardeniers; M.C. Elwenspoek; A. van den Berg


Book ID
108469432
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
289 KB
Volume
81
Category
Article
ISSN
0925-4005

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