The design and performance of an r.f. sputtering machine with continuous production capability : P. Granger and C. R. D. Priestland. Vacuum21, No. 8 (1971), p. 309

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 106 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90214-4