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The depth distribution of disorder produced by room temperature 30 keV Ar+ and Cl+ ion irradiation of silicon

✍ Scribed by N.A.G. Ahmed; C.E. Christodoulides; G. Carter


Book ID
103773602
Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
349 KB
Volume
69
Category
Article
ISSN
0375-9601

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