The deposition of alumina, silica and magnesia films by electron bombardment evaporation: B Lewis, Microelectronics & Reliab, 3 (2), 1964, 109–120

• Publisher: Elsevier Science
• Year: 1965
• Tongue: English
• Weight: 122 KB
• Volume: 15
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(65)91724-0