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The crystalline to amorphous transformation in silicon

✍ Scribed by Jack Washburn; Cheruvu S. Murty; Devendra Sadana; Peter Byrne; Ronald Gronsky; Nathan Cheung; Roar Kilaas

Publisher
Elsevier Science
Year
1983
Weight
862 KB
Volume
209-210
Category
Article
ISSN
0167-5087

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A detailed transmission electron microscopy (TEM) study has been carried out on the effect on helium-filled cavities (bubbles), contained entirely within a buried amorphous layer in silicon, of the recrystallisation of the layer by solid-phase epitaxial growth. On annealing to temperatures in the ra