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The crossover of refrigerator-cooled cryopumps

✍ Scribed by C Juhnke; HH Klein; S Schreck; U Timm; HU Häfner; M Mattern-Klosson; H-J Mundinger

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 235 KB
Volume: 44
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(93)90132-t

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