The correlation of the results of capacitance mapping and of sheet resistance mapping in semi-insulating 6H–SiC

✍ Scribed by Shenghuang Lin; Zhiming Chen; Peng Liang; Dong Jiang; Huajie Xie; Ying Yang

• Book ID: 116605403
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 517 KB
• Volume: 489
• Category: Article
• ISSN: 0925-8388
• DOI: 10.1016/j.jallcom.2009.07.070