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The Conversion of Perhydropolysilazane into SiON Films Characterized by X-Ray Photoelectron Spectroscopy

✍ Scribed by Wang, Kaishi; Zheng, Xiaohao; Ohuchi, Fumio S.; Bordia, Rajendra K.; Riedel, R.

Book ID: 119877274
Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 272 KB
Volume: 95
Category: Article
ISSN: 0002-7820
DOI: 10.1111/jace.12045

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