✦ LIBER ✦
The Control of Shrinkage and Thermal Instability in SU-8 Photoresists for Holographic Lithography
✍ Scribed by Robert G. Denning; Christopher F. Blanford; Henning Urban; Harpal Bharaj; David N. Sharp; Andrew J. Turberfield
- Publisher
- John Wiley and Sons
- Year
- 2011
- Tongue
- English
- Weight
- 623 KB
- Volume
- 21
- Category
- Article
- ISSN
- 1616-301X
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