✦ LIBER ✦
The characteristics of a modified planar-magnetron sputtering source : K. I. Kirov, S. S. Georgiev, N. A. Ivanov and G. M. Minchev. Vacuum28, (4) 183
- Publisher
- Elsevier Science
- Year
- 1978
- Tongue
- English
- Weight
- 119 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0026-2714
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