✦ LIBER ✦
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
✍ Scribed by Jansen, H; Boer, M de; Legtenberg, R; Elwenspoek, M
- Book ID
- 120270991
- Publisher
- Institute of Physics
- Year
- 1995
- Tongue
- English
- Weight
- 755 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0960-1317
No coin nor oath required. For personal study only.