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The Application of Phosphazene Containing Polymers as Negative Resists in Microlithography

โœ Scribed by Puyenbroek, Robert; Bosscher, Gerard; Van De Grampel, Johan C.; Rousseeuw, Bernard A. C.; Van Der Drift, Emile W. J. M.


Book ID
120265361
Publisher
Taylor and Francis Group
Year
1994
Tongue
English
Weight
186 KB
Volume
93
Category
Article
ISSN
1042-6507

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