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The application of ERD and RBS techniques for determining h depth profiles and impurity contents in a-Si:H layers

✍ Scribed by Gy. Zentai; F. Pászti; A. Manuaba


Book ID
119444118
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
207 KB
Volume
90
Category
Article
ISSN
0022-3093

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