The application of energetic ions to form a Si/SiC multilayer system for reflection of radiation between 20 and 80 nm

✍ Scribed by S. Dobrovolskiy; A.E. Yakshin; M.J.H. Kessels; J. Verhoeven

• Book ID: 103859352
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 381 KB
• Volume: 237
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.03.285