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The application of energetic ion beams to thin metallic films

โœ Scribed by Steven M. Hues


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
523 KB
Volume
6
Category
Article
ISSN
0921-5107

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โœฆ Synopsis


The mteractton oJ energetic ton beams wtth thin metalhc fihns produces several effects whtch ate usejul tn the ~tudv o7 moch#catton oJ the~e Jthns 7he effects o) both lol,-and htgh-energy ton beams on metal films ate dt~cussed, along wtth apph~a-tlon~ Jot the characterlzatton atzd phystcal proper 0 tnodlfi~ atton oJ metallu fihn s


๐Ÿ“œ SIMILAR VOLUMES


Application of ion beam analysis to the
โœ A. Vomiero; C. Scian; G. Della Mea; V. Guidi; G. Martinelli; G. Schiffrer; E. Co ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 125 KB

Ion beam analysis was successfully applied to a novel technique, named selective sublimation process (SSP), for deposition of nanostructured gas-sensing films through reactive sputtering. The method consists of the co-deposition of a mixed oxide, one of which has a relatively low sublimation tempera