The application of energetic ion beams to thin metallic films
โ Scribed by Steven M. Hues
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 523 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0921-5107
No coin nor oath required. For personal study only.
โฆ Synopsis
The mteractton oJ energetic ton beams wtth thin metalhc fihns produces several effects whtch ate usejul tn the ~tudv o7 moch#catton oJ the~e Jthns 7he effects o) both lol,-and htgh-energy ton beams on metal films ate dt~cussed, along wtth apph~a-tlon~ Jot the characterlzatton atzd phystcal proper 0 tnodlfi~ atton oJ metallu fihn s
๐ SIMILAR VOLUMES
Ion beam analysis was successfully applied to a novel technique, named selective sublimation process (SSP), for deposition of nanostructured gas-sensing films through reactive sputtering. The method consists of the co-deposition of a mixed oxide, one of which has a relatively low sublimation tempera