✦ LIBER ✦
The application of electrochemical metrologies for investigating chemical mechanical polishing of Al with a Ti barrier layer
✍ Scribed by Shao-Yu Chiu; Ying-Lang Wang; Chuan-Pu Liu; Jin-Kun Lan; Chyung Ay; Ming-Shiann Feng; Ming-Shih Tsai; Bau-Tong Dai
- Book ID
- 114193717
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 320 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0254-0584
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