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The apparent effect of sample surface damage on the dielectric parameters of GaAs

โœ Scribed by J.A.A. Engelbrecht; N.G. Hashe; K.T. Hillie; C.H. Claassens

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
158 KB
Volume
401-402
Category
Article
ISSN
0921-4526

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โœฆ Synopsis

The dielectric and optical parameters determined by infrared reflectance spectroscopy and computer simulation of a set of GaAs substrates of various surface topologies are reported. The influence of surface damage on the parameters is noted.

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