✦ LIBER ✦
The anisotropic model for simulation of a multilayer structure dry etching : Piotr Glowacki and Zbigniew Tkaczyk. Electron. Technol.21(3/4), 61 (1988)
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 123 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0026-2714
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