The analytical solution of the contact problem of spherical indenters on layered materials: application for the investigation of TiN films on silicon

✍ Scribed by N. Schwarzer; M. Whittling; M. Swain; F. Richter

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 453 KB
• Volume: 270
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(95)06751-5