✦ LIBER ✦
The analysis of waveguiding effects on the minimum transferable linewidth of an ultrafine X-ray mask: Takakuwa, M.; Furuya, K. IEICE Transactions on Electronics, 1993 Apr
- Book ID
- 103533217
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 142 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0141-6359
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