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The aligned Si nanowires growth using MW plasma enhanced CVD

✍ Scribed by N.N. Dzbanovsky; V.V. Dvorkin; V.G. Pirogov; N.V. Suetin

Book ID: 104051054
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 490 KB
Volume: 36
Category: Article
ISSN: 0026-2692
DOI: 10.1016/j.mejo.2005.04.035

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