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The adsorption and surface reaction of SiCl4 on Si(100)-(2 × 1)

✍ Scribed by Q. Gao; Z. Dohnalek; C.C. Cheng; W.J. Choyke; J.T. Yates Jr.


Book ID
118366984
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
837 KB
Volume
302
Category
Article
ISSN
0039-6028

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