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The ABC of pattern evolution in self-destruction of thin polymer films

✍ Scribed by Rajesh Khanna; Ashutosh Sharma; Günter Reiter

Book ID
106275136
Publisher
Springer
Year
2000
Weight
464 KB
Volume
2
Category
Article
ISSN
1435-3725

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## Abstract The understanding of the lateral morphology stability of thin polymer devices is of fundamental importance. In this work, the lateral morphology in a model system consisting of thin polymer films capped with thin metal layers on a Si substrate is investigated. When the model system is h