✦ LIBER ✦
Tetrahedral carbon film by hydrogen gas reactive rf-sputtering of graphite onto low temperature substrate
✍ Scribed by Akio Hiraki; Toshifumi Kawano; Youichi Kawakami; Masao Hayashi; Tatsuro Miyasato
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 213 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0038-1098
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